Investigation of LiCoO2 thin film battery properties with changing Ar/O2 gas atmosphere

Thin film batteries are considered the most promising next-generation due to their superior safety and highly developed energy density. The deposition of LiCoO2 thin films with 200 nm thickness was carried out by radio frequency magnetron sputtering. were deposited in Ar/O2 gas mixture coated samples which 3% 10% oxygen amounts, labeled as LCO-3 LCO-10, respectively. Deposited LCO-10 possess phase purity high crystallinity have a uniform nanostructure an average grain size 30-60 homogeneous dispersion. cyclic voltammetry curves electrodes upon electrochemical cycling revealed transformations both materials. ionic conductivity been exhibited more convenient results than samples. electrode manifests specific capacity 48 ?Ah/cm2 initial cycle. This study provides information on how crystal structure properties affected changing parameters such at mixture.